Micro process engineering (Record no. 3547)

MARC details
000 -LEADER
fixed length control field 00404nam a22001337a 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 250519b |||||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9783527335008
245 ## - TITLE STATEMENT
Title Micro process engineering
Remainder of title fundamentals, device fabrication and applications
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication Wein heim
Name of publisher Wiley-Vch
Date of publication 2013
300 ## - COLLATION
Pagination xv 497
Other physical details ill
650 ## - TRACINGS
Main Subject production engineering
Subdivision (1st) Microtechnology
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Item type Books
050 ## - LIBRARY OF CONGRESS CALL NUMBER
Classification number TS183
Item number .M52
Holdings
Source of classification or shelving scheme Not for loan Permanent location Current location Date acquired Accession No. Full call number Barcode. Koha item type
Library of Congress Classification   Engineering Library Engineering Library 05/19/2025 2024/63688 TS183.M52 2013 2025-2018 Books