Micro process engineering  fundamentals, device fabrication and applications 

 - Wein heim   Wiley-Vch  2013 
 - xv 497  ill 
<br/><br/><label>ISBN: </label>9783527335008 
<br/><br/><label>Subjects--Topical Terms: </label><br/>production engineering--Microtechnology
<br/><br/><label>LC Class. No.: </label>TS183  / .M52