TY  - BOOK
TI  - Micro process engineering: fundamentals, device fabrication and applications
SN  - 9783527335008
AV  - TS183 .M52
PY  - 2013///
CY  - Wein heim
PB  -  Wiley-Vch
KW  - production engineering
KW  - Microtechnology
ER  -