| 000 | 00404nam a22001337a 4500 | ||
|---|---|---|---|
| 008 | 250519b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9783527335008 | ||
| 050 |
_aTS183 _b.M52 |
||
| 245 |
_aMicro process engineering _bfundamentals, device fabrication and applications |
||
| 260 |
_aWein heim _b Wiley-Vch _c2013 |
||
| 300 |
_axv 497 _bill |
||
| 650 |
_aproduction engineering _vMicrotechnology |
||
| 942 | _cBK | ||
| 999 |
_c3547 _d3547 |
||